Brooks, Model 5851e – Brooks Instrument 5851E User Manual

Page 52

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4-20

Brooks

®

Model 5851E

Section 4 Maintenance

Installation and Operation Manual

X-TMF-5851E-MFC-eng

Part Number: 541B104AAG

November, 2008

Figure 4-5 Restrictor Element Assembly

Figure 4-6 Restrictor Element Orientation in Controller Body

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