Brooks, Model 5850i – Brooks Instrument 5850i User Manual

Page 33

Advertising
background image

4-5

Brooks

®

Model 5850i

Section 4 Maintenance

Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008

Figure 4-2a Valve Adjusting Spacer Locations (Normally Closed Valve N.C.)

Advertising