Brooks Instrument 5850i - Manual (Page 36)

Brooks ® Model 5850i
4-8
Section 4 Maintenance Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008
6. Remove and note the position of the valve spring spacers (10), which
may be located above and/or below the lower guide spring (8). Remove
the preload spacer spring (33)(NO Valve).
7. Unscrew the orifice (12) from the flow controller body(14).
8. Carefully unscrew the valve seat (11) from the plunger assembly (7)(NC
Valve) or the plunger assembly (31,32,35)(NO Valve).
Note the position and number of spacers (9) that are stacked on the
threaded end of the valve seat.
9. Remove the three screws (20) attaching the electronics cover. Remove
the electronics cover (23).
Figure 4-3 Voltmeter Connections for Valve Adjustment