IM 12B6J3-E-H
10
FU20
O-ring
Fitting
Adapter( /FPS )
/HCNF, SPRAY CLEANER
FU20 + ADAPTER
FU20 + FD40
Figure 8. Installation examples for the FU20
Process
Flow
/SN3/SR3/FN4
/FR4
Cleaning
Solution
(water, acid, etc.)