INFICON STC-2002 Thin Film Deposition Controller Quick Start Guide - Manual (Page 5)

STC-2002 Quick Start Guide
Sycon Instruments, Inc.
instruments
Basic Operation Flow Chart:
To perform a practice run of X thickness at
X rate:
Press MENU key
Press "Review SS
Map"
Set SOURCE
MAX PWR to
100%, and CH1
START MODE to
"ACTIVE"
Press BYE to
return to Menu
Screen
Press "REVIEW
FILM"
SS MAP Select 1
Set SOAK1 PWR
VALUE to 50%,
PWR RAMP1
TIME to 00:11,
PWR SOAK1
TIME to 00:11,
and MAX
POWER LIMIT to
100%
Press STATUS
key to return to
Run-time Screen
Press START key
to initiate start
sequence
Unit power on,
connected
NEXT FILM menu:
Enter
Film ID no.
REVIEW SS MAP
menu:
Select outputs,
tooling, sensor
values
REVIEW FILM
menu:
Enter Film
parameters, select
MAP
Power On
Check back panel
connections,
safety interlocks
and cooling water
Return to
Run-time Screen
(Status key)
Ready to Start
MENU screen:
Press
NEXT FILM
Edit Map 1
Edit Film 1
5
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• East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298