INFICON BPG400 ATM to Ultra-High Vacuum Gauge - Manual

Bayard-Alpert Pirani Gauge
BPG400
BPG400-SD
BPG400-SP
Instruction Sheet
Incl. EC Declaration of Conformity
tima03e1-d (2013-11)
Product Identification
In all communications with INFICON, please specify the in-
formation given on the product nameplate. For convenient
reference copy that information into the space provided
below.
Model:
PN:
SN:
V W
INFICON AG, LI-9496 Balzers
Validity
This document applies to products with the following part
numbers (PN):
BPG400 ( without display)
353-500 (DN 25 ISO-KF)
353-502 (DN 40 CF-R)
BPG400 (with display)
353-501 (DN 25 ISO-KF)
353-503 (DN 40 CF-R)
BPG400-SD (with DeviceNet interface and switching functions)
353-507 (DN 25 ISO-KF)
353-508 (DN 40 CF-R)
BPG400-SP (with Profibus interface and switching functions)
353-505 (DN 25 ISO-KF)
353-506 (DN 40 CF-R)
The part number (PN) can be taken from the product name
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the gauge with part number
353-500. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The BPG400, BPG400-SD and BPG400-SP gauges have
been designed for vacuum measurement of gases in the
pressure range of 5×10
-10 … 1000 mbar.
They must not be used for measuring flammable or combusti-
ble gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.
The gauges can be operated in connection with the VGC103
or VGC40x Vacuum Gauge Controller or with another in-
strument or control device.
Functional Principle
Over the whole measuring range, the gauge has a
continuous characteristic curve and its measuring signal is
output as logarithm of the pressure.
The gauge functions with a Bayard-Alpert hot cathode ioni-
zation measurement system (for p < 2.0×10
-2 mbar) and a
Pirani measurement system (for p > 5.5×10 -3 mbar). In the
overlapping pressure range of 2.0Ч10 -2 … 5.5Ч10 -3 mbar, a
mixed signal of the two measurement systems is output. The
hot cathode is switched on by the Pirani measurement sys-
tem only below the switching threshold of 2.4×10
-2 mbar (to
prevent filament burn-out). It is switched off when the pres-
sure exceeds 3.2×10
-2 mbar.
Trademark
DeviceNet™ Open DeviceNet Vendor Association, Inc.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and en-
vironmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried
out by persons who have suitable technical training and
the necessary experience or who have been instructed by
the end-user of the product.
General Safety Instructions
• Adhere to the applicable regulations and take the ne-
cessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
• Adhere to the applicable regulations and take the ne-
cessary precautions for all work you are going to do and
consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.)
to the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Gauge failures due to contamination or wear and tear, as well
as expendable parts (e.g. filament), are not covered by the
warranty.
Technical Data
In some points, the technical data of BPG400-SD
and BPG400-SP differ from those of BPG400, which
are given below (
→ "Technical Data" in  [1] and
[2]).
Measuring range
(air, O 2 , CO, N 2 )
5×10
-10 … 1000 mbar
continuous
Accuracy 15% of reading in the range
of 1×10
-8 … 10 -2 mbar
(after 5 min. stabilization)
Repeatability 5% of reading in the range of
1×10
-8 … 10 -2 mbar
(after 5 min. stabilization)
Emission
Switching on threshold
Switching off threshold
2.4×10
-2 mbar
3.2×10 -2 mbar
Emission current
p ≤ 7.2×10 -6 mbar
7.2×10 -6 mbar < p
< 3.2×10 -2 mbar
5 mA
25 µA
Emission current switching
25 µA  5 mA
5 mA  25 µA
7.2×10
-6 mbar
3.2×10 -5 mbar
Degas
Current (p <7.2×10 -6 mbar)
≈16 mA (P
degas ≈4.0 W)
Control input signal 0 V/24 V(dc), high active
Duration <3 min, followed by
automatic stop
In degas mode, the BPG400 keeps supplying pressure
readings, the tolerances of which can be higher than
during normal operation.
Output signal
(measuring signal)
0 … +10 V
Measuring range 0.774 … 10 V
(5×10
-10 … 1000 mbar)
Voltage vs. pressure logarithmic,
0.75 V/decade
Error signal ( →  [1]) ≈0.3 V (hot cathode error)
≈0.5 V (Pirani error)
Minimum load impedance 10 k Ω
Gauge identification 42 k Ω between Pin 10 and
Pin 5 (gauge cable)
RS232C interface
Data rate
Data format
Connector
9600 Baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→ "Power Connection"
Further information on the RS232C interface →  [1]
Display panel (353-501,
353-503) LCD matrix, 32×16 pixels,
with background illumination
Dimensions 16.0 mm × 11.2 mm
Pressure units mbar (default),
Torr, Pa (Selecting the
pressure unit
→  [1])
Supply
DANGER
The gauge must only be connected to power
supplies, instruments or control devices that
conform to the requirements of a grounded pro-
tective extra-low voltage (SELV). The connection
to the gauge has to be fused
1) .
Voltage at gauge 24 V(dc) (20 … 28 V(dc))
(ripple ≤2 V
pp ) 2)
Power consumption
Standard
Degas
Emissions start (200 ms)
≤0.5 A
≤0.8 A
≤1.4 A
Fuse required 1) ≤1.25 AT
Power consumption ≤16 W
1) INFICON controllers fulfill these requirements.
2) Consider the voltage drop on the sensor cable.
Electrical connection D-Sub, 15-pin, male
Sensor cable
For analog values only,
without degas function
For analog values,
with degas function
All functions,
incl. RS232C interface
4 conductors, shielded
5 conductors, shielded
7 conductors, shielded
Cable length (24 V(dc)) ≤35 m (4/5/7x0.25 mm²)
≤50 m (4/5/7x0.34 mm²)
≤100 m (4/5/7x1.0 mm²)
For operation with RS232C
interface
≤30 m
Materials on the vacuum side
Housing, supports,
screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element
stainless steel
NiFe nickel plated
glass
iridium, yttrium oxide (Y
2 O 3 )
molybdenum
tungsten, copper
Internal volume
DN 25 ISO-KF
DN 40 CF-R ≈24 cm 3
≈34 cm 3
Maximum admissable
Pressure
2 bar (absolute)
Admissible temperatures
Storage
Operation
Bakeout
–20 … +70 °C
0 … +50 °C
150 °C (without electronics
unit)
Relative humidity
Year’s mean
During 60 days
≤65% (not condensable)
≤85% (not condensable)
Use indoors only
altitude up to 2000 m NN
Type of protection IP 30
Dimensions [mm]
4-40UNC 2B
DN 25 ISO-KF DN 40 CF-R
4-40UNC 2B
Weight
353-500, 353-501
353-502, 353-503
353-505, 353-507
353-506, 353-508 ≈285 g
≈550 g
≈430 g
≈695 g
Measuring Signal vs. Pressure
1E+01
1E–01
1E–03
1E–05
1E–07
1E–09
1E+03
Measuring signal U[V]
0.0
S en
sor
er
ro r
un
der
ra
n ge
ove
rra
nge
1E+04
1E+02
1E+00
1E–02
1E–04
1E–06
1E–08
1E–10
1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Pressure p [mbar]
p = 10 (U-7.75)/0.75+c
U p c
[V] [mbar] 0
[V] [Pa] 2
[V] [Torr]
-0.125
where p pressure
U measuring signal
c constant (pressure unit dependent)
Gas Type Dependence
For gases other than air, the pressure in the indication range
p < 10
-3 mbar can be determined by a simple conversion:
p eff = C × pressure indicated
Gas
type Calibration
factor C
Gas type Calibration
factor C
He
Ne
Kr
Ar
5.9
4.1
0.5
0.8 air, O 2 , CO, N 2 H 2 Xe
1.0
2.4
0.4
Installation
Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type clamps which
are suited to overpressure.
DANGER
DANGER: protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF connection fulfill this requirement
• For gauges with a KF flange, use a conduc-
tive metallic clamping ring
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
The gauge may be mounted in any orientation. To
keep condensates and particles from getting into the
measuring chamber, preferably choose a horizontal
to upright position.
The gauge is supplied with a built-in grid. For poten-
tially contaminating applications and to protect the
electrodes against light and fast particles, installation
of the optional baffle is recommended (
→  [1]).
Remove the protective lid and install the product to the
vacuum system, preferably without applying vacuum grease.
Protective lid
Clamp
Seal with centering ring
or
Seal with centering
ring and filter
Keep the protective lid.
Power Connection (BPG400)
The following information on the electrical con-
nection as well as the wiring diagram applies to
BPG400 only (
→  [1] and [2] for details on the
electrical connection and additional functions of
BPG400-SD and -SP).
Make sure the vacuum connection is properly made
( → "Vacuum Connection").

If no connection cable is available, make one according
to the following diagram.
Electrical connection
Pin 2 Signal output (measuring signal) 0 … +10 V
Pin 5 Supply common, GND
Pin 7 Degas on, active high +24 VDC
Pin 8 Supply +24 VDC
Pin 10 Gauge identification
Pin 12 Signal common, GND
Pin 13 RS232C, TxD
Pin 14 RS232C, RxD
Pin 15 Shielding, housing, GND
Pins 1, 3, 4, 6, 9 and 11 are
not connected internally.
8
9 1
15
D-Sub, 15-pin
female,
soldering side
TxD
42k Ω
RxD
Measuring
signal
Degas
+Ub
13
14
2
12
7
8
5
15
+
1.25AT
Identification 10
RS232C
+ 24 V –
BPG400
t i ma 0 3 e 1 - d (2013-11)
Original: German tima03d1-d (2013-11)