Brooks Instrument 1355 - Manual (Page 23)

5-1
Models 1350E and 1355E
Section 5 Parts List
Installation and Operation Manual
X-VA-1350E-eng
Part Number: 541B082AAG
August 2012
5-1 General
When ordering parts please specify:
Brooks Serial Number
Model Number
Part Number
Description and Quantity
(Refer to Figure 5-1 and Table 5-1)