INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 135
MDC-360 DEPOSITION CONTROLLER
11-7
COMPUTER INTERFACE
Year 2
(0-99)
Total 12 byt
es
Example: To instruct the controller to send the t
e the computer would
send:
Chr$(255)+Chr$(2
hr$(1)+C
(4)+Ch
(251)
6. Receive time and date (Code #5)
Instructs the controller to enter the incoming time and date into memory. The
values must be in the order, range, and format lis
7. Send a material (Code #6)
r to send all the m
rial pa
terial # n to the
host computer. A description of the material para
ime and dat
54)+C
hr$
r$(0)+Chr$
ted above.
Instructs the controlle
ate
rameters for ma
meter list is in the table below:
Parameter name
Len
bytes
Byte
Offset
Decimal Pt.
Position
Range
Units
Material #
1
0
(0-31)
No
*
ne
Material Name
0
*
1
1
Sensor #
1
11
*
(1-4)
None
Crystal #
1
12
*
(1-8)
None
Source #
1
13
*
(1-4)
None
Pocket #
1
14
*
(1-8)
None
Rate Establish Time
1
15
*
(0-99)
Seconds
Power Alarm Delay
1
16
*
(0-99)
Seconds
Sample
%
Dwell %
1
17
*
(0-100)
Crystal Fail
1
18
*
4 = Halt
5 =TimePwr
6 =Switch
Backup Sensor #
1
19
*
(1-4)
None
Backup Crystal #
1
20
*
(1-8)
None
Material Density
2
21
2
80-9999
0.01 gm/cm
3
Acoustic Impedance
2
23
2
400-5999
0.01 gm/cm
2
/sec
Tooling Factor
2
25
1
100-4999
0.1%
Proportional gain
2
27
*
1-9999
None
Integral Time constant
2
29
1
0-999
0.1 Seconds
Deri
2
nds
vative Time
constant
31
1
0-999 0.1
Seco
Rise to Soak Time
2
33
*
999
Seconds
0-35
Soak Power
2
35
1
0-999
0.1%
Soak Time
2
37
*
0-35999
Seconds
Rise to Predeposit Time
2
39
*
0-35999
Seconds
Predeposit Power
2
41
1
0-999
0.1%
Predeposit Time
2
43
*
9
Seconds
0-3599
Rate Establish Error %
2
0.1 Å/sec
45
1
0-999
Deposition Rate #1
2
0-9999
0.1 Å/sec
47
1