INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 79)

MDC-360 DEPOSITION CONTROLLER
5-5 OPERATING THE MDC-360
The data log option provides storage for up to 16 process logs and/or 27,000 data
ck such that newest process is at the top of the
stack and the oldest process is at the bottom of the stack. The start of the next
The last or 16th
w
t
lled Data Points/Min and
can be found in the Utility Setup menu. The following table shows the total
storage time based on the number of data points per minute
ter.
rox. Storag
(minute
point sets of real time run data. A process log consists of the process name, run
number, starting time and date, ending time and the completion status of the run.
The process logs are stored in a sta
process will push all of the logs down one position on the stack.
process log on the stack will be lost.
A data point set consists of the measured deposit rate, rate deviation, thickness
and the deposit power. The 27,000 data point sets are stored in a circular buffer
such that new data will overwrite the oldest data. If data from the current process
overwrites an older process than that entire process will be erased. If data from
the current process tries to overwrite the start of the current process then data
logging is stopped so that the beginning of the process is saved.
During a process, data is logged automatically up to 10 data point sets per minute.
At this rate the 27,000 data point storage can hold 45 minutes of data. To allo
for longer processes, the user has the ability to change the number of data poin
sets stored per minute. The parameter to modify is ca
parame
Data Points/Minute Ap e Time
s)
30 900
60 450
120 225
300 90
600 45
To view a stored process log select the View Results option from the Main Menu.
nt a screen with the process log in Figure -9. From this
6 process logs can be sel wing that this
ailable if the Internal Data Storage and Time/Date Clock option
This will prese shown 5
screen any of the 1 ected for vie . Note
screen is only av
installed.