INFICON Cygnus Thin Film Deposition Controller User Manual
Cygnus, Thin film deposition monitor
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Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Declaration Of Conformity
- Warranty
- Table Of Contents
- Chapter 1 Introduction and Specifications
- 1.1 Introduction
- 1.2 Instrument Safety
- 1.3 How To Contact Customer Support
- 1.4 Cygnus Specifications
- 1.4.1 Measurement
- 1.4.2 Screens and Parameters
- 1.4.3 User Interface
- 1.4.4 Display
- 1.4.5 Source / Recorder Outputs
- 1.4.6 Logic Processing
- 1.4.7 Relays / Inputs
- 1.4.8 Remote Communications
- 1.4.9 Accessories
- 1.4.10 Power
- 1.4.11 Operating Environment
- 1.4.12 Storage Temperature
- 1.4.13 Warm Up Period
- 1.4.14 Size
- 1.4.15 Connector Clearance Requirements
- 1.4.16 Weight
- 1.4.17 Cleaning
- 1.5 Unpacking and Inspection
- 1.6 Parts and Options Overview
- 1.7 Initial PowerOn Verification
- Chapter 2 Operation
- 2.1 Front Panel Controls
- 2.2 Rear Panel Interfaces
- 2.3 Displays
- 2.4 Crystal Life, Starting Frequency and Activity
- 2.5 Defining a Process
- 2.6 State Descriptions
- 2.7 Special Features
- Chapter 3 Channel Parameters
- Chapter 4 General Parameters
- Chapter 5 Remote Communications
- 5.1 Remote Communications Overview
- 5.2 Physical Connections
- 5.3 Message Protocols
- 5.4 Cygnus Communication Commands
- 5.4.1 ECHO Command
- 5.4.2 HELLO Command
- 5.4.3 Parameter Commands
- 5.4.4 STATUS Commands
- 5.4.5 REMOTE Commands
- 5.4.6 Negative Response Error Codes
- 5.5 Sample Cygnus Commands
- Chapter 6 Installation and Interfaces
- Chapter 7 Calibration Procedures
- Chapter 8 Troubleshooting, Status and Error Messages
- Chapter 9 Measurement and Control Theory
- Appendix A Material Table
- Index
- A
- C
- cable noise 6-7
- calibration 7-3
- channel display 2-12
- channel parameters 3-12, 5-10
- communication
- components and assemblies 8-9
- control
- control unit installation 6-5
- controller
- counters 4-16
- cross sensitivity correction 7-4
- cross talk percent 3-11, 7-4
- CRT screen 2-1
- crystal 9-2
- crystal replacement 8-20
- crystal switch 2-24
- CrystalSix 8-24
- Customer Service 1-6
- Customer Support
- D
- E
- F
- G
- H
- I
- L
- M
- N
- O
- P
- Q
- R
- S
- safety 1-2
- Sales and Customer Service 1-6
- secondary tooling 3-3
- sensor
- serial communication 6-13
- series resonance 9-8
- Service Center 1-6
- source control connection 6-10
- source/crucible selection 2-26
- spattering 6-4
- specifications 1-7
- spreadsheet program 2-32
- spurious shift 9-10
- state descriptions 2-23
- status code 5-24
- T
- U
- V
- W
- X
- Z