INFICON Cygnus Thin Film Deposition Controller - Manual (Page 126)

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Cygnus Operating Manual
Table 5-7 shows Action Codes in HEX notation.
 "s" indicates Channel number: 0 to 6
 "n" indicates Channel number: 1 to 6
Maximum Pwr s Maximum Power s 0x57 0xA9
Minimum Pwr s Minimum Power s 0x58 0xA8
Thick Sum x xxx.xxx Thickness Sum x xxx.xxx
(x = 1 to 3, equation number
from general parameters;
xxx.xxx = 0 to 999.9 kÅ)
see note 1
0x59 0xA7
NOTE 1: Thickness Limit and Thickness Sum will be sent as an integer Angstroms
(the number here *1000)
NOTE 2: Timer Limit HH:MM second numeric will be sent as
an integer number of minutes.
NOTE 3: Timer Limit Sec value will be sent as an integer tenth of seconds.
Table 5-7 Action Codes
Name Description Code
External Out On x Set External Output x (x = 1 to 38) 0x41
External Out Off x Clear External Output x (x = 1 to 38) 0x42
Start n Start (Go to Pre-Dep) n 0x43
Stop s Stop (Idle at Power = 0) s 0x44
Reset s Reset s 0x45
Zero Thick s Zero Thickness s 0x46
Switch Xtal n Switch Crystal n 0x47
Clock Hold On n Non-Rate Control Clock Hold On n 0x48
Clock Hold Off n Non-Rate Control Clock Hold Off n 0x49
Xtl Fl Inhibit On s Crystal Fail Inhibit On s 0x4A
Xtl Fl Inhibit Off s Crystal Fail Inhibit Off s 0x4B
Start Timer x (Re)Start Timer x (set timer to zero
and start incrementing) (x = 1 to 20) 0x4C
Cancel Timer x Cancel Timer x (set timer to zero and
don’t increment) (x = 1 to 20) 0x4D
Clear Counter x Clear Counter x (x = 1 to 20) 0x4E
Table 5-6 Event Codes (continued)
Name Description Normal Negated