Ocean Optics NanoCalc - Manual (Page 75)

Ocean Optics Germany GmbH Thin Film Metrology
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13 APPENDIX A
13.1 NanoCalc-Quick-Setup
This Appendix helps you step by step to get a first measurement. This description is using the reference
stepwafer from OceanOptics, SiO2-Steps on Si-Wafer.
Install the NanoCalc software and AD-Converter (see Appendix A)
Start the computer and light source
Plug-In the USB-Cable (or blue AD-Cable), then install fiber cable between the spectrometer and light
source.
Start the NanoCalc software
Put the reference (bare Si-Wafer) on the stage
Click the buttons "continuous mode" and then “reference”
Set the integration time to 3 ms
Now adjust the fiber distance between wafer and fiber in that way that you get the highest possible
signal. A typical distance is 1- 5 mm
Now adjust the integration time in that way that the Max-Level is around 0.8 on your screen
Click again the button "continuous mode" to stop the measurement
Click the button "reference"
Now you are ready to work with the NanoCalc System!