Brooks Instrument QMBM User Manual

Page 24

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QmB Series IP40, IP66, IP66XP

Section 1 Introduction

1-12

Installation and Operation Manual

X-CM-QmB-eng

Part Number: 541B029AAG

June, 2011

Figure 1-6 Dimensional Drawing QmB IP66

Figure 1-5 Dimensional Drawing QmB IP40 with Remote Valve

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