Brooks Instrument QMBM User Manual

Page 49

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Section 4 Maintenance

4-9

Installation and Operation Manual

X-CM-QmB-eng
Part Number: 541B029AAG
June, 2011

QmB Series IP40, IP66, IP66XP

Figure 4-3 Exploded Diagram of Valve Assembly

Figure 4-4 Valve Torque Pattern

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