Brooks Instrument 5882/92 - Manual (Page 13)

13
Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
Pin Function
1
Command Common
2 Signal output voltage
3 Valve Common
4 Current output
5 +15 Vdc to +24 Vdc supply
6
7
Valve voltage tp.
8 Command
9 Supply common
10 Signal common
11 Ref. output
12 Valve override
Figure 2-1
Standard and EEx nA execution
Figure 2-3, EEx d. execution
Figure 2-4
Figure 2-2
Section 2 Installation