Brooks Instrument 5882/92 - Manual (Page 26)

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Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
5-2 Service Tools
- Slotted head screwdriver
- Tweeker
- Allen head key wrench
- Syringe with silicon
- Torque wrench (3.5 N.m.)
Figure 5-1 Flomega spare parts
Section 5 Spare Parts