Brooks Instrument 5882/92 - Manual (Page 9)

9
Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
When EEx d IIB T4...T6 required, please contact factory for detailed dimensional drawing.
Connections A A with filter
5/16” - 24 UNF 143,5 mm 175 mm
1/16” Tube Compression 176,5 mm 208 mm
1/8” Tube Compression 188 mm 220 mm
1/4” Tube Compression 188 mm 220 mm
1/4” NPT(F) 208 mm 240 mm
Figure 1-1 Dimensions
Section 1 Introduction