Brooks, Mf series – Brooks Instrument Mfi Series User Manual

Page 50

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4-12

Brooks

®

Mf Series

Section 4 Maintenance &
Troubleshooting

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Figure 4-3a Valve Adjusting Spacer Locations ( Normally Closed Valve )

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