Brooks Instrument Mfi Series - Manual (Page 7)

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Brooks ® Mf Series
Contents Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Tables
Table Page
Number Number
1-1 Flow Ranges .............................................................................................................................. 1-2
1-2 Power Requirements .................................................................................................................. 1-4
1-3 Mf Series Controllers and Meters Terminal Strip Hookup .......................................................... 1-5
2-1 Recommended Filter Size .......................................................................................................... 2-3
4-1 Bench Troubleshooting .............................................................................................................. 4-3
4-2 Sensor Troubleshooting ............................................................................................................. 4-4
4-3 Mf Series Torque Requirements ................................................................................................ 4-10
4-4 Orifice Capacities ...................................................................................................................... 4-16
4-5 Conversion Factor( Nitrogen Base) ........................................................................................... 4-19
4-6 Model Mf50/60 Series Standard Restrictors .............................................................................. 4-22
4-7 Model Mf51/61 Restrictor Selection Guide ................................................................................ 4-24
5-1 Mf Series Common Replacement Parts ..................................................................................... 5-5
5-2 Model Mf50/60 Replacement Parts ............................................................................................ 5-6
5-3 Model Mf51/61 Replacement Parts ............................................................................................ 5-7
5-4 Model Mf53/63 Replacement Parts ............................................................................................ 5-8
5-5 Mf Series Tool and Spare Part Kits ............................................................................................. 5-9