Brooks, Mf series – Brooks Instrument Mfi Series User Manual

Page 51

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4-13

Brooks

®

Mf Series

Section 4 Maintenance &

Troubleshooting

Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Figure 4-3b Valve Adjusting Spacer Locations ( Normally Open Valve )

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