IM 12B6J3-02E-E
5
FU20
O-ring
Fitting
Adapter
( /FPS )
PG7
/HCNF, SPRAY CLEANER
FU20 + ADAPTER
FU20 + FD40
Figure 3. Installation examples for the FU20
Process
Flow
/SN3/SR3/FN4
/FR4
Cleaning
Solution
(water, acid, etc.)