INFICON Cool Drawer Single Sensor - Manual (Page 27)

2 - 1
PN
07
4-
60
9-
P1
A
Cool Drawer Single and Dual Sensors Operating Manual
Chapter 2
Sensor Installation
2.1 Pre-installation Sensor Check
Prior to installing the sensor in the vacuum system, make certain that it is in proper
working condition by following the appropriate procedure.
CAUTION
The sensor head, water tube, etc., should be clean and
free of grease when installed in the vacuum chamber.
Clean nylon gloves should be worn while handling. If
parts do become contaminated, clean them thoroughly
using a suitable solvent to avoid outgassing.
2.1.1 Sensor Installation with a XTC/3
™
, IC6
™
or
Cygnus 2
™
Deposition Controller
1 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 755-257-G6) to the BNC
connector on the feedthrough.
2 Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector of the
Modelock oscillator (XIU) (PN 781-600-GX).
3 Connect one end of the XIU cable (PN 600-1261-GXX) to the mating connector
of the XIU.
4 Connect the other end of the XIU cable to a sensor channel at the rear of the
controller.
5 Install the crystal as instructed by section 4.4 on page 4-10 .
6 Connect power to the controller.
7 Set the power switch ON.
8 Set density at 1.00 g/cm 3 .
9 Zero thickness.
10 The display should indicate 0 or ±0.001 kÅ.
Crystal life should read from 0 to 5%.
11 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 kÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, the sensor is in proper working order and
may be installed.