2 sensor installation with a sqm-160, Sqc-310, Sqm-242 – INFICON Cool Drawer Single Sensor User Manual

Page 28: Iqm-233, Stm-2xm, Or stm-3, Deposition controller/monitor

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Cool Drawer Single and Dual Sensors Operating Manual

2.1.2 Sensor Installation with a SQM-160

, SQC-310

, SQM-242

,

IQM-233

, STM-2XM

, or STM-3

Deposition Controller/Monitor

1

Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011) to the
BNC connector on the feedthrough.

2

Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector of the
oscillator (PN 782-900-010 or 783-500-013) labeled "Feedthrough" or
"Sensor."

3

Connect one end of the oscillator cable (PN 782-902-012-XX) to the mating
connector of the oscillator labeled "Instrument" or "Control Unit."

4

Connect the other end of the oscillator cable to a sensor connector at the rear
of the controller/monitor.

5

Install the crystal as instructed by

section 4.4 on page 4-10

.

6

Connect power to the controller.

7

Set the power switch ON.

8

For the SQM-242 or IQM-233 card, launch the appropriate software.

9

Set density at 1.00 g/cm

3

.

10

Zero thickness.

11

The display should indicate 0 or ±0.001 kÅ.
Crystal life should read from 95% to 100%.

12

Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 kÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.

If the above conditions are observed, the sensor is in proper working order and
may be installed.

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