INFICON PEG100-P Medium to Ultra-High Vacuum Gauge - Manual (Page 2)

General Remarks
We reserve the right to alter the design or any data given
in these Operating Instructions.
The illustrations are not binding. Contents
Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.1 Penning Gauge PEG100-P . . . . . . . . . . . . . 3
1.2.2 Profibus DP . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.3 Profibus-DP Master Configuration Software . 3
1.3 Technical Description . . . . . . . . . . . . . . . . . 4
1.3.1 Configuration of Fieldbus nodes in
Profibus-DP . . . . . . . . . . . . . . . . . . . . . . . . 4
1.3.1.1 GSD File / Main Equipment File . . . . . . . . . 4
1.4
Technical Data . . . . . . . . . . . . . . . . . . . . . . 4
1.5 Supplied Equipment . . . . . . . . . . . . . . . . . . 4
2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Operation of PEG100-P . . . . . . . . . . . . . . . 5
2.1.1 Setting Slave’s Address . . . . . . . . . . . . . . . 5
2.2 Input and Output Data . . . . . . . . . . . . . . . . 5
2.2.1 Meaning of PEG100-P (slave) input
and output data . . . . . . . . . . . . . . . . . . . . . 6
2.2.1.1 PEG100-P output data (output data
from the master’s view point) . . . . . . . . . . . 6
2.2.1.2 PEG100-P input data
(from master’s view point) . . . . . . . . . . . . . . 6
2.3 Data of diagnosis . . . . . . . . . . . . . . . . . . . . 7
3 Service at INFICON . . . . . . . . . . . . . . . . . . 7
4 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . 7
EEC Declaration of Conformity . . . . . . . . . . . . . . . 8
Declaration of Contamination . . . . . . . . . . . . . . . . 9
2
tina15e1-a (0206) PEG100-P.ga