INFICON Gemini ATM to Ultra-High Vacuum Gauge - Manual (Page 10)

10 tina83e1-a (2014-02)
2 Technical Data
Measurement range (air, N
2
)
MAG
MPG
1Ч10
-9 … 1Ч10 -2 mbar
1×10
-9
… 1000 mbar
Accuracy MAG (N
2
)
1Ч10
-8
… 1Ч10
-2
mbar 30% of reading
Accuracy MPG (N
2
)
1×10 -8 … 100 mbar
100 … 1000 mbar
30% of reading
50% of reading
Repeatability (N
2
)
MAG, 1Ч10
-8
… 1Ч10
-2
mbar
MPG, 1×10
-8
… 100 mbar
5% of reading
5% of reading
Gas type dependence
MAG
MPG
→  18
→  20
Voltage range (analog output) 0 … +10.5 V
Measurement range
3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P
+1.5 … +8.5 V (dc)
+0.667 … +10 V (dc)
+1.398 … +8.6 V (dc)
Voltage vs. pressure
3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P
1 V/decade, logarithmic
1.33 V/decade, logarithmic
0.6 V/decade, logarithmic
Status signal 14.5 … 30 V (ignited)
Error signal
3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P
<+0.5 V
≤+0.3 V
+9.5 … +10.5 V
Output impedance 2 × 4.7 Ω, short-circuit proof
Load impedance ≥10 k Ω, short-circuit proof
Step response time
p > 10
-6
mbar
p = 10
-8
mbar
pressure dependent
<100 ms
≈ 1 s