INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual

Page 49

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background image

tina83e1-a (2014-02)

49

Corre

ction

Tur

n

on

pow

er

sup

p

ly

.

R

epl

ace i

oni

zati

on

ch

am

-

ber

or

m

eas

ur

ing c

h

am

-

ber

cpl

.(→

43

, 4

5

).

Sw

itch on

th

e hi

gh

vol

tag

e (

28)

.

Evacua

te the

vacu

um

system to <1

0

-2

m

bar

and

sw

itch the

ga

ug

e of

f a

nd

on a

gai

n vi

a "H

V ON

".

W

a

it, unti

l t

he

gas

di

s-

char

ge has

igni

te

d

(≈

5 m

inutes

at

a pr

ess

u

re

of 1

0

-9

mb

a

r).

Sw

itch th

e g

aug

e o

ff a

nd

on a

gai

n aft

e

r 5 s.

R

epl

ace the

ga

uge

.

R

epl

ace the

m

easur

in

g

cham

ber

c

p

l. (

45)

.

Possible

ca

use

No

su

pp

ly vo

ltag

e

.

Gaug

e co

ntam

in

ate

d

.

N

o

hi

gh

vol

ta

ge i

n th

e

m

easur

ing c

ham

be

r.

Over

pr

essur

e

in

th

e

m

easur

ing c

ham

be

r.

Gas

di

sch

ar

ge has not

igni

ted

.

EEPR

OM

er

ro

r.

M

easur

ing c

ham

be

r

severely co

ntamin

ate

d.

Status

signal

0

0

0

0

0

14.5

30 V

LED

<HV-ST>

off

lid

so

lid

gr

een

off

b

lin

kin

g

gr

een

off

lid

so

lid

gr

een

LED

<ST>

off

lid

so

lid

gr

een

lid

so

lid

gr

een

lid

so

lid

gr

een

bl

in

ki

ng

red

lid

so

lid

gr

een

Problem

N

o

vol

ta

ge

at si

gnal

o

ut

put.

M

easur

ing si

gnal

unst

abl

e.

Vol

tag

e a

t si

gn

al

o

u

tp

ut

1.2

V (3MAx-xxx-0x0

N

)

0.4

V

(3MAx-xxx-0x0Q

).

Vol

tag

e a

t si

gn

al

o

u

tp

ut

con-

tinual

ly

< 0.3 V

(3MAx-xxx-0x0

N

)

< 0.5 V

(3MAx-xxx-0x0

Q

).

Si

gnal

c

onti

nual

ly

a

t a

ppr

ox.

10

-4

m

bar

.

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