Brooks Instrument SLA5800 Series - Manual

Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Brooks ® Digital MFC's & MFM's
Brooks ® SLA5850, SLA5851, SLA5853
Mass Flow Controllers Models
and Models SLA5860, SLA5861, SLA5863
Mass Flow Meters
Model SLA5850S
Analog I/O MFC
with RS-485
Model SLA5850S
Analog I/O MFC
with RS-485
Elastomer Downport
Model SLA5853S
Analog I/O MFC
with RS-485
Model SLA5850D
Digital I/O
DeviceNet TM MFC
with Coplanar Valve
Model SLA5850F
Digital I/O
F OUNDATION Fieldbus MFC
with Coplanar Valve