Brooks, Digital mfc's & mfm's – Brooks Instrument SLA5800 Series User Manual

Page 17

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1-11

Section 1 Introduction

Brooks

®

Digital MFC's & MFM's

Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013

Figure1-5 Model SLA5850D Digital I/O Devicenet MFC

Figure 1-6 Model SLA5850S Analog I/O MFC with RS-485 Elastomer Downport Connections

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