IAI America ISPDACR-ESD - Manual (Page 44)

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5. Installation
5.6 Suction for the Cleanroom Type
IS actuators of cleanroom specification with protective stainless sheet can demonstrate their designed
cleanliness of cleanroom class 10 (0.3
Pm) when air is suctioned from the suction joint. The table below
lists reference suctioning rates for each model at different rated speeds.
5.6.1 Reference Suctioning Rates
Model Lead Suctioning rate (N/min) Pressure (mmAq)
4 10 -3
8 20 -6
IS(P)D(A)CR-S
16 30 -13
5 15 -4
IS(P)D(A)CR-M
10 30 -12
IS(P)D(A)CR-M(X) 20 70 -40
IS(P)D(A)CR-L 10 30 -10
IS(P)D(A)CR-L(X) 20 90 -60
10 40 -60
20 60 -170
IS(P)D(A)CR-W(X)-600
40 120 -520
25 60 -170
IS(P)D(A)CR-W(X)-750
50 120 -520
x Prepare an air tube and connect it to the suctioning port, or the quick joint of ‡12 in external diameter
provided on a side face of the actuator, and use a vacuum pump, blower, ejector, etc., to suction air at
an appropriate flow rate as specified above.
x If suctioning equipment is available, check its capacity. If no suctioning equipment is available, select a
vacuum pump, blower or other appropriate suctioning equipment by referring to the values listed above.