INFICON XTC/C Thin Film Deposition Controller User Manual

Page 153

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18

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XTC/C - XTC/2 Operating Manual

6. control voltage output does
not function properly

a. DAC board damaged from
applying voltage to the control
voltage output

a. ensure cable connection to
the DAC board does not have
a potential across the
contacts, contact INFICON
service department

b. reversed polarity of control
voltage relative to that
accepted by the source power
supply

b. verify source output polarity
of DAC and the required input
polarity of the source power
supply, refer to the instruction
manual to reconfigure the
instrument if necessary

c. improper control cable
fabrication

c. check for correct cable
wiring in the appropriate
section of the manual

7. LCD display dull or blank

a. brightness/contrast
adjustment required

a. refer to manual for location
of adjustment potentiometer,
adjust as required

b. LCD Power supply problem

b. contact INFICON service
department

8. poor rate control

a. control loop parameters
improperly selected

a. refer to the instruction
manual section on tuning
control loop parameters

b. electron beam sweep
frequency "beating" with the
instrument’s measurement
frequency

b. adjust the sweep frequency
so it is not a multiple of the
instruments measurement
frequency

9. crystal fail always on

a. XIU/oscillator not
connected

a. verify proper
sensor/oscillator connections

b. XIU/oscillator
malfunctioning

b. if available, insert a known
working XIU/oscillator in place
of the suspect one; if
XIU/oscillator is confirmed
bad, contact INFICON service
department

c. defective cable from
feedthrough to XIU/oscillator
or from instrument to
XIU/oscillator

c. use an ohm meter or DVM
to check electrical continuity
or isolation as appropriate

d. poor electrical contact in
the transducer, feedthroughs,
or in-vacuum cable

d. use an ohm meter or DVM
to check electrical continuity
or isolation as appropriate

e. failed crystal/no crystal

e. replace crystal/insert
crystal

f. two crystals placed in the
same crystal holder

f. remove one of the crystals

Table 6-1 Troubleshooting the Instrument (continued)

SYMPTOM

CAUSE

REMEDY

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