INFICON XTC/C Thin Film Deposition Controller - Manual (Page 94)

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XTC/C - XTC/2 Operating Manual
S11 . . . . Output status - returns a string of 16 ASCII bytes, 1 per output. Each
byte has an ASCII value of 0 or 1, corresponding to the output status.
S12 . . . . Input status - returns 9 ASCII bytes, 1 per input. Each byte has an
ASCII value of 0 or 1, corresponding to the input’s status.
Position Outputs
1 Source Shutter 1 1=open, 0=closed
2 Source Shutter 2 1=open, 0=closed
3 Sensor Shutter 1 1=open, 0=closed
4 Sensor Shutter 2 1=open, 0=closed
5 Stop 1=stop, 0=not stop
6 End of Process 1=end of process
0=not end of process
7 Thickness Setpoint 1=Thk Setpoint
8 Feedtime (Soak 2) 1=soak 2 phase
9 Crystal Fail 1=Xtal Fail
10 Alarms 1=Alarm Cond.
11 Source 1/Source 2
(toggle) 1=Source 2, 0=Source 1
12 End Deposit 1=closed
13 Crucible Select (LSB)
14 Crucible Select binary value encoding
15 Crucible Select (MSB)
16 Unused
Input # Function
1 Start
2 Stop
3 End
4 Sample Initiate
5 Sample Inhibit
6 Crystal Fail Inhibit
7 Zero Thickness
8 Soak 2 Hold
9 Crucible Valid?
9 8 7 6 5 4 3 2 1
0 = grounded (active)