INFICON XTC/C Thin Film Deposition Controller - Manual (Page 52)

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XTC/C - XTC/2 Operating Manual
2.6.5 AUX I/O
A 25-pin male "D" type connector for interface connection, see Figure 2-14 on
page 2-24 and section 3.7 on page 3-15 .
Figure 2-14 25-Pin Type "D" Male Connector
Pin # Function
Relay # Outputs (Relays)
7 1,2 Thickness setpoint/End of Film*
8 3,4 Feedtime (SOAK 2)
9 5,6 Crystal fail
10 7,8 Alarms/In Process*
11 9,10 Source 1/Source 2 toggle (closed
when source 2 is active)
12 11,12 End Deposit
Input# Inputs
13 Input common (GND)
9 14 Crucible valid
15,16,17 Input common (GND)
TTL Output # Outputs (Open Collector 1 of 8 encoding)**
1 18 Crucible select 1
2 19 Crucible select 2
3 20 Crucible select 3
4 21 Crucible select 4
5 22 Crucible select 5
6 23 Crucible select 6
7 24 Crucible select 7
8 25 Crucible select 8
*NOTE: See description of configuration switch 13,
section 2.6.2 on page 2-19 .
**NOTE: The crucible select outputs are available BCD encoded on the
Sensor 1 connector, see
section 2.6.6 on page 2-25 .