Step 2: low magnification microscope inspection, Pyramid probes: new core inspection – Cascade Microtech Pyramid Probes User Manual

Page 2

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Pyramid Probes: New Core Inspection • 2

Step 2: Low Magnification Microscope Inspection

Inspection Area

Criteria

Membrane

Are there any tears noted anywhere on the membrane?

A membrane tear is defined as a torn membrane caused by mishandling or

equipment malfunction. Tears on a new core that have been repaired by the

factory are acceptable, as long as the repaired patch does not exceed

1000μm.

Has the membrane come off the alignment pin?

WARNING: Do not install in a box or board until repaired.
Contact local support for instructions.

Is there any damage to the membrane?

Escalate to a higher magnification inspection to determine if there is a

failure.

Is the probe face clean of any debris?

Follow the procedure in Pyramid Probe Core Off-line Cleaning With Brush to

clean the face after incoming inspection is complete.

Are there scratches on the wings with exposed metal?

Scratches on the wings are acceptable as long as the metal is not exposed.

Plungers

Are there any cracks in the plunger beams from the tester side?

These types of cracks are not acceptable on new cores.

Are there any cracks in the plunger beams from the wafer side?

These types of cracks are

not acceptable on new cores.

Repaired membrane, acceptable

Tear in membrane

Tester Side

Wafer Side

Pyramid Probes: New Core Inspection

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