Cascade Microtech Pyramid Probes - Manual (Page 6)

PN 153-690-3 www.cascademicrotech.com Pyramid Probes: New Core Inspection • 6
Membrane
Surface
Have any particles penetrated the membrane (poly2) surface after the thinfilm fabrication
process?
The presence of External Embedded
Particles is unacceptable on a new core.
Were any particles created or formed below the membrane (poly2) surface during the
thinfilm fabrication process?
Internal Embedded Particles are acceptable as long as they pass all other specifications.
Polyimide may appear rough and discolored around the beams, component attachment pads, or any other
plated metal area forming part of the membrane surface:
• On the probe face, this is acceptable up to 200µm radius around the beams or other plated
metal area forming part of the membrane surface.
• On the wings and the interface area, this is acceptable in all areas.
Unacceptable
Cross section with external
embedded particle.
Acceptable
Cross section with internal
embedded particle
Acceptable
Pyramid Probes: New Core Inspection