Stc-2000a quick start guide, Sycon instruments, inc – INFICON STC-2000A Thin Film Deposition Controller Quick Start Guide, Non-sequencing User Manual

Page 5

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STC-2000A Quick Start Guide

Sycon Instruments, Inc

.

5

6757 Kinne Street

• East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298

instruments



Basic Operation Flow Chart:

To perform a practice run of X thickness at
X rate:


NEXT FILM menu:

Enter

Film ID no.

REVIEW SS MAP

menu:

Select outputs,

tooling, sensor

values

REVIEW FILM

menu:

Enter Film

parameters, select

MAP

Power On

Check back panel

connections,

safety interlocks

and cooling water

Return to

Run-time Screen

(Status key)

Ready to Start

MENU screen:

Press

NEXT FILM

Edit Map 1

Edit Film 1

Press MENU key

Press "Review SS

Map"

Set SOURCE

MAX PWR to

100%, and CH1

START MODE to

"ACTIVE"

Press BYE to

return to Menu

Screen

Press "REVIEW

FILM"

SS MAP Select 1

Set SOAK1 PWR

VALUE to 50%,

PWR RAMP1

TIME to 00:11,

PWR SOAK1

TIME to 00:11,

and MAX

POWER LIMIT to

100%

Press STATUS

key to return to

Run-time Screen

Press START key

to initiate start

sequence

Unit power on,

connected

First “Start” button press clears

“STOP” status to “READY”.

From READY state or IDLE state,
“Start” button press begins film.

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