Stc-2000a quick start guide, Sycon instruments, inc – INFICON STC-2000A Thin Film Deposition Controller Quick Start Guide, Non-sequencing User Manual
Page 5
STC-2000A Quick Start Guide
Sycon Instruments, Inc
.
5
6757 Kinne Street
• East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
instruments
Basic Operation Flow Chart:
To perform a practice run of X thickness at
X rate:
NEXT FILM menu:
Enter
Film ID no.
REVIEW SS MAP
menu:
Select outputs,
tooling, sensor
values
REVIEW FILM
menu:
Enter Film
parameters, select
MAP
Power On
Check back panel
connections,
safety interlocks
and cooling water
Return to
Run-time Screen
(Status key)
Ready to Start
MENU screen:
Press
NEXT FILM
Edit Map 1
Edit Film 1
Press MENU key
Press "Review SS
Map"
Set SOURCE
MAX PWR to
100%, and CH1
START MODE to
"ACTIVE"
Press BYE to
return to Menu
Screen
Press "REVIEW
FILM"
SS MAP Select 1
Set SOAK1 PWR
VALUE to 50%,
PWR RAMP1
TIME to 00:11,
PWR SOAK1
TIME to 00:11,
and MAX
POWER LIMIT to
100%
Press STATUS
key to return to
Run-time Screen
Press START key
to initiate start
sequence
Unit power on,
connected
First “Start” button press clears
“STOP” status to “READY”.
From READY state or IDLE state,
“Start” button press begins film.