INFICON XTC/3 Thin Film Deposition Controller Communications Library Operating Manual User Manual
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XTC/3 Communications Library Operating Manual
Table 1-1 Film Parameters accessible via Set and Get
Command ID
Description
Function
0
Rise Time 1
int setFilmRiseTimeOne (unsigned long *val, int index,char* ErrMsg,
BOOL TCP);
int getFilmRiseTimeOne (unsigned long *val, int index, char*
ErrMsg,unsigned short *len, BOOL TCP);
1
Soak Power 1
int setFilmSoakPowerOne (float *val, int index, char* ErrMsg,
BOOL TCP);
int getFilmSoakPowerOne (float *val, int index, char* ErrMsg,
unsigned short *len, BOOL TCP);
2
Soak Time 1
int setFilmSoakTimeOne (unsigned long *val, int index, char*
ErrMsg, BOOL TCP);
int getFilmSoakTimeOne (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);
3
Rise Time 2
int setFilmRiseTimeTwo (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);
int getFilmRiseTimeTwo (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);
4
Soak Power 2
int setFilmSoakPowerTwo (float *val, int index , char* ErrMsg,
BOOL TCP);
int getFilmSoakPowerTwo (float *val, int index, char* ErrMsg,
unsigned short *len, BOOL TCP);
5
Soak Time 2
int setFilmSoakTimeTwo (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);
int getFilmSoakTimeTwo (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);
6
Idle Ramp
int setFilmIdleRamp (unsigned long *val, int index , char* ErrMsg,
BOOL TCP);
int getFilmIdleRamp (unsigned long *val, int index, char* ErrMsg,
unsigned short *len, BOOL TCP);
7
Idle Power
int setFilmIdlePower (float *val, int index , char* ErrMsg, BOOL
TCP);
int getFilmIdlePower (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);
8
Deposition Rate
int setFilmDepRate (float *val, int index , char* ErrMsg, BOOL TCP);
int getFilmDepRate (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);