Adjustment and settings, Further information – INFICON HPG400-SP High Pressure / Pirani Gauge User Manual
Page 4
Adjustment and Settings
For HPG400-SD and HPG400-SP gauge
Adjusting the Gauge (Full Scale)
The gauge is factory calibrated. If used under different cli-
matic conditions, at extreme temperatures, through aging or
contamination and after exchanging the sensor, the charac-
teristic curve can be offset and readjustment can become
necessary. Only the Pirani element can be adjusted and only
at atmosphere.
Readjustment becomes necessary if
• at atmosphere the output voltage is <9.75 V or the display
reading is <atmosphere
• when venting the vacuum system, the output voltage
reaches 9.75 V before the measured pressure has
reached atmosphere.
(For more details
→ [2], "Maintenance, Repair").
n
If you are using a seal with centering ring and filter,
check that they are clean or replace them if necessary
(
→ [1], [2], "Deinstallation").
o
Put the gauge into operation.
Operate the gauge for
≈10 minutes at atmos-
pheric pressure. If the gauge was operated
within the hot cathode range, a cooling-down
time of
≈30 minutes is to be expected (gauge
temperature = environmental temperature).
p
Adjusting the gauge:
Insert a Pin (
≈ø1.3 mm) through the opening marked
"FULL SCALE" and push the button inside for at least
5 seconds.
Max. ø1.3
The gauge is now automatically adjusted. The
adjustment takes
≈4 s.
The gauge is now adjusted.
Setting the Switching Functions
The threshold values of switching functions A and B can be
set within the pressure range 2×10
-6
mbar … 100 mbar via
potentiometers "SETPOINT A" and "SETPOINT B".
For the corresponding threshold voltages, the following equa-
tion applies:
U
Threshold
= 10 / 9 × (log p
Setpoint
– c + 6)
Constant c depends on the pressure unit,
Where
p
c
[mbar]
0
[Torr]
-0.125
[Pa]
2
Pressure p
Me
asur
ed valu
e
Off
Off
On
Time t
Switching function
Hysteresis
10 % U
Threshold
Threshold
U
The hysteresis of the switching functions is 10% of the
threshold setting.
n
Put the gauge into operation.
o
Connect the (+) lead of a voltmeter to the threshold
measurement point of the selected switching function
("Setpoint A" Pin 3, "Setpoint B" Pin 6) and its (–) lead
to Pin 5.
Max. ø2.5
Setpoint A Pin 3
Setpoint B Pin 6
Pin 5
p
Using a screwdriver (max. ø2.5 mm), set the threshold
of the selected switching function (Setpoint A, B) to the
desired value U
Threshold
The setting of the switching functions is now concluded.
A functional check of the switching functions (On/Off) is
only possible via fieldbus interface (
→ [3] for
HPG400-SD,
→ [4] for HPG400-SP) or by measur-
ing the relay contacts with a continuity checker/ohm-
meter (
→ "Electrical Connection", sensor cable con-
nector).
Further Information
[1]
www.inficon.com
Instruction Sheet
High Pressure / Pirani Gauge HPG400
tima31e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2]
www.inficon.com
Operating Manual
High Pressure / Pirani Gauge
HPG400, HPG400-SD, HPG400-SP
tina31e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3]
www.inficon.com
Communication Protocol
DeviceNet™ High Pressure / Pirani Gauge
HPG400-SD
tira03e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[4]
www.inficon.com
Communication Protocol
Profibus
Bayard-Alpert Pirani Gauge BPG400-SP
High Pressure / Pirani Gauge HPG400-SP
tira36e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[5]
www.inficon.com
("Semiconductor and Vacuum coating processes,
Vacuum Gauges")
Product descriptions and downloads
INFICON AG, LI–9496 Balzers, Liechtenstein
[6]
www.odva.org
Open DeviceNet Vendor Association, Inc.
DeviceNet™ Specifications
[7]
www.profibus.com
Profibus user organization
[8]
European Standard for DeviceNet EN 50325
[9]
European Standard for Profibus EN 50170
LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
[email protected]
www.inficon.com