INFICON VSC150A absolute switch, passiv User Manual
Vacuum switch vsc150
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Table of contents
Document Outline
- Contents
- Description
- Accessories
- Connection to the Vacuum System
- Electrical connection
- Design Versions and Switch Point Setting
- Differential Pressure Adapter
- Typical Applications
- Protection of a Gate Valve which must only be Operated when Pressure on both Sides Becomes Equal
- In a Vacuum System it must be Prevented that in Case of Failure Gas Flows into the Vacuum Chamber M
- Automatic Venting of a Vacuum Chamber
- Automatic Venting of a Vacuum Chamber
- Differential Pressure Monitoring, Positive and Negative Going R M
- Maintenance
- Service at INFICON
- EEC Declaration of Conformity
- Declaration of Contamination