Omega FMA 1500 User Manual
Page 24
TABLE VI FMA 1400 SOLENOID VALVE ORIFICE SELECTION TABLE
8.
TROUBLESHOOTING
8.1
Common Conditions
Your Mass Flow Meter/Controller was thoroughly checked at numerous quality
control points during and after manufacturing and assembly operations. It was cal-
ibrated in accordance to your desired flow and pressure conditions for a given gas
or a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:
✓
Are all cables connected correctly?
✓
Are there any leaks in the installation?
✓
Is the power supply correctly selected according to requirements?
When several meters are used a power supply with appropriate
current rating should be selected.
✓
Were the connector pinouts matched properly?
When interchanging with other manufacturers' equipment, cables
and connectors must be carefully wired for correct pin configurations.
✓
Is the pressure differential across the instrument sufficient?
19
ORIFICE PART NUMBER
FLOW RATE [N2]
OR.010
under 10 sccm
OR.020
10 to 1000 sccm
OR.040
1 to 5 slpm
OR.055
5 to 10 slpm
OR.063
10 to 15 slpm
OR.073
15 to 20 slpm
OR.094
20 to 50 slpm
OR.125
50 to 100 slpm