Omega FMA 1500 - Manual (Page 3)

TABLE OF CONTENTS
1. UNPACKING THE FMA 1400/1500 MASS FLOW METER................
1.1 Inspect Package for External Damage.........................................
1.2 Unpack the Mass Flow Meter/Controller.......................................
1.3 Returning Merchandise for Repair...............................................
2. INSTALLATION............................................................
2.1 Primary Gas Connections............................................................
2.2 Electrical Connections.................................................................
3. PRINCIPLE OF OPERATION..............................................
4. SPECIFICATIONS...........................................................
4.1 FMA 1500 Mass Flow Meters for ranges up to
and above 10 L/min......................................................................
4.2 FMA 1400 Mass Flow Controllers for ranges up to
and above 10 L/min......................................................................
4.3 CE Compliance............................................................................
5. OPERATING INSTRUCTIONS.............................................
5.1 Preparation and Warm Up...........................................................
5.2 Flow Signal Output Readings.......................................................
5.3 Swamping Condition...................................................................
5.4 Set Point Reference Signal (FMA 1400).........................................
5.5 TTL, Valve OFF Control (FMA 1400)...............................................
5.6 Valve Test/Purge (FMA 1400).........................................................
6. MAINTENANCE............................................................
6.1 Introduction.................................................................................
6.2 Flow Path Cleaning......................................................................
6.2.1 Restrictor Flow Element (RFE).................................................
6.2.2 FMA 1400/1500 Ranges up to 10 L/min................................
6.2.3 FMA 1400/1500 Ranges above 10 L/min................................
6.2.4 Valve Maintenance (FMA 1400)..............................................
7. CALIBRATION PROCEDURES..............................................
7.1 Flow Calibration..............................................................................
7.2 Calibration of FMA 1500 Mass Flow Meters...................................
7.2.1 Connections and Initial Warm Up..........................................
7.2.2 ZERO Adjustment.................................................................
7.2.3 SPAN Adjustment.................................................................
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