Omega FMA 1500 User Manual
Page 32
27
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.2031
.0608
.2691
.32
.2792
.2541
.1961
.4616
.48
1.44
Actual Gas
K Factor
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Phosphorous Trichloride PCl
3
Propane C
3
H
8
Propylene C
3
H
6
Silane SiH
4
Silicon Tetrachloride SiCl
4
Silicon Tetrafluoride SiF
4
Sulfur Dioxide SO
2
Sulfur Hexafluoride SF
6
Sulfuryl Fluoride SO
2
F
2
Tetrafluoroethane (Forane 134A) CF
3
CH
2
F
Tetrafluorohydrazine N
2
F
4
Trichlorofluoromethane (Freon-11) CCl
3
F
Trichlorosilane SiHCl
3
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl
2
FCClF
2
Triisobutyl Aluminum (C
4
H
9
)AL
Titanium Tetrachloride TiCl
4
Trichloro Ethylene C
2
HCl
3
Trimethylamine (CH
3
)
3
N
Tungsten Hexafluoride WF
6
Uranium Hexafluoride UF
6
Vinyl Bromide CH
2
CHBr
Vinyl Chloride CH
2
CHCl
Xenon Xe
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
8.36
8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
.161
.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378