Aalborg XFM Digital User Manual

Page 12

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9

*Flow rates are stated for Nitrogen at STP conditions [i.e. 70

F

F (21.1

F

C) at 1 atm].

For other gases use the K factor as a multiplier from APPENDIX 2.

CODE

scc/min [N

2

]

CODE

std liters/min [N

2

]

00

0 to 5

07

0 to 1

01

0 to 10

08

0 to 2

02

0 to 20

09

0 to 5

03

0 to 50

10

0 to 10

04

0 to 100

05

0 to 200

06

0 to 500

TABLE I XFM 17 LOW FLOW MASS FLOW METER*

TABLE II XFM 37 MEDIUM FLOW MASS FLOW METER*

FLOW RANGES

CODE

std liters/min [N

2

]

30

20

31

30

32

40

33

50

TABLE III XFM XFM 47/57/67/77 HIGH FLOW MASS FLOW METERS*

CODE

std liters/min [N

2

]

40

60

41

80

42

100

50

200

60

500

70

1000

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