1introduction – Trebor IQ Chemical Heater User Manual

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MODEL IQ QUARTZ HEATER OPERATION / MAINTENANCE MANUAL

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Shown with Optional Capacitive
Fluid Sensor and Pillar Super 300
Fluid Connections and Drain

1

INTRODUCTION

IQ Chemical Heater - The Smart Choice!

Trebor’s IQ in-line quartz chemical heater provides the ultra-high purity you demand, with
the reliability you expect.

The IQ’s flow path is smooth, free of particle traps and constructed entirely of GE 214
quartz and PFA, making it compatible with all non-combustible chemistries, except HF &
KOH. The PFA enclosure ensures plenum compatibility and resists corrosion or
discoloration. Most importantly, unlike immersion style resistive heaters your application is
free from metal ion contamination risk if the external thin-film heating element should fail.

Trebor’s patented sealing technology not only protects against liquid leaks, but eliminates
the breakage commonly associated with fragile quartz fluid connections. Plus, there are no
O-rings to service or replace.

Simplicity and flexibility are key elements of the IQ heater. The modular design allows
heaters to be connected in parallel or series. Heaters are available in multiple voltages
and with multiple fluid fitting options to accommodate your heating needs.

Features

Quartz/PFA liquid path

Multiple fluid fitting options

No metal contamination risk

No particle traps

Efficient heat transfer and small thermal

volume for fast response

SEMI S2, S3, and CE compliant

Performance Summary

IQL — Low Temperature

Metric

English

Maximum Pressure

.55 MPa 80 psig

Maximum Chemical
Operating Temperature

100 °C

212 °F

IQH — High Temperature

Maximum Pressure

.31 MPa 45 psig

Maximum Chemical
Operating Temperature

200 °C

392 °F

IQL/IQH

Minimum Pressure

.10 MPa 15 psig

Minimum Flow Rate

2 LPM

.53 GPM

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