Notes on operation, Operation principle of the vsk 3000, Operation principle vsp 3000 – VACUUBRAND DCP 3000 User Manual

Page 29

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Operation principle of the VSK 3000

The VSK 3000 is equipped with a capacitive pressure transducer with

ceramic diaphragm to measure the actual pressure

independent of the

gas type and depending on the vacuum, i.e., absolute.

The pressure value is displayed with a resolution of 0.1 Torr (mbar) in the

pressure range from 0.1 to 795 Torr (0.1 to 1060 mbar).

Operation principle VSP 3000

The pressure transducer VSP 3000 relies on the fact that the thermal

conductivity of the residual gas in the vacuum chamber is a measure for

the gas pressure. The thermal conductivity of gases is proportional to the

pressure within a certain range and is related to the molecular mass.

The thermal conductivity of gases and vapors varies with their molecular

mass. Therefore the pressure measurement is dependent on the gas

type. The pressure transducer has been adjusted for air at the factory.

Diagram: Gas dependence of a VSP 3000

true pressure [mbar]

displayed pressure [mbar]

air

helium

argon

+

Pressure of gases with similar mass, such as O

2

or CO, can be read

off directly within the uncertainty of the measurement.

+

With gases of lower or higher mass (H

2

, He, Ar, CO

2

) it is recommend-

ed to readjust the VSP 3000 using the gas to be measured.

Notes on operation

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