1-13
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Figure 1-10 Model SLA5853S Analog I/O MFC with Flanged Connections
Figure 1-9 Model SLA5853F Digital I/O F
OUNDATION
Fieldbus MFC