Brooks Instrument SLA5800 Series - Manual (Page 9)

1-3
Section 1 Introduction
Brooks ® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Pressure Sensitivity
± 0.03% per psi up to 200 psig (N
2
eq.)
Maximum Operating Pressure
See Table 1-1 below:
Optional 4500 psig (300 bar) For 50,60 and 61 Series body only.
All devices pressure tested without fittings.
Pressure Equipment Directive (PED) 97/23/EC
See Table 1-1:
Pressure Differential Range (Controllers)
Minimum:
Model SLA5850
5 psi (0.35 bar) up to 50 lpm (N
2
eq.)
Model SLA5851
10 psi (0.69 bar) from 30 lpm to 100 lpm (N
2
eq.)
Model SLA5853
7.5 psi (0.52 bar) at 500 lpm (N
2
eq.)
14.5 psi (1.00 bar) at 1000 lpm (N
2
eq.)
35.0 psi (2.41 bar) at 2500 lpm (N
2
eq.)
High DP valve 30 psi (2.07 bar) to 290 psi (20 bar max.)
Low DP valve 7.5 psi (0.52 bar) to 30 psi (2.07 bar max.)
Minimum pressure drop depends on gas and FS flow rate (consult factory)
Leak Integrity
Inboard to Outboard: 1x10
-9 atm scc/sec Helium max.
Helium leak test performed without fittings.
Ambient Temperature Limits
Operating: 0°C to 65°C (32°F to 149°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Fluid Temperature Limits
0°C to 65°C (32°F to 149°F)
(1) 300 bar (4500 psi) version optional.
(2) Max. Delta P for 5853 is 20 bar (300 psi).
(3) 70 bar / 1000 psi for UL Certification.
SEP
SEP
SEP
1 for all 150 lbs flanges
2 for all other
connections
Table 1-1 Flow Ranges and Pressure Ratings
Mass Flow Mass Flow Flow Ranges Pressure PED Module H Category
Controller Meter N
2
Eq.Ratings Unit
Model: Model: Min. f.s. Max. f.s. Bar/psi
SLA5850 (1)
SLA5851
SLA5853 (2)
SLA5860
SLA5861 (1)
SLA5863
0.003
0.003
20
100
50
50
100
2500
lpm
slpm
lpm
lpm
100bar/1500 psi
300bar/4500 psi
100bar/1500 psi (3)
70 bar/1000 psi