Brooks Instrument SLA5800 Series - Manual (Page 21)

1-15
Section 1 Introduction
Brooks ® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Figure 1-13 Model SLA5863D Digital I/O Devicenet MFM
Figure 1-14 Model SLA5863 Analog I/O MFM with Flanges