Ped), Emc), Esd) – Brooks Instrument MT3809G User Manual
Page 65: Greek
A-9
Section A Essential Instructions
Installation and Operation Manual
X-VA-MT3809G-MT3810G-eng
Part Number: 541B182AAG
September, 2013
Models MT3809G & MT3810G
!
Brooks Instrument
,
.
,
.
,
Brooks Instrument.
,
,
,
.
,
.
,
.
.
:
’
.
/
.
Brooks Instrument.
,
.
.
.
: (1)
.
. (2)
.
,
.
.
Brooks Instrument.
.
,
.
,
.
:
,
,
.
,
.
(PED)
0,5 bar (g)
25 mm
1
(PED).
PED.
97/23/
.
Brooks Instrument
1.
25 mm 1
,
PED.
25 mm 1
(SEP).
(EMC)
(
/
)
Brooks Instrument
CE
(
2004/108/EC
EMC).
CE.
,
:
Brooks Instrument
CE.
,
100%
.
«D»
.
.
360
.
.
.
100%
CE.
.
:
.
(ESD)
:
.
,
.
:
1.
.
2.
,
.
3.
.
.
,
.
:
ESD (
)
.
(NMOS, SMOS .).
.
,
,
.
Greek