Yokogawa µR20000 - Manual (Page 51)

6-6 SM 04P02B01-01E
3
4 5
7
9
11
1
6
8
10
2
2
2
2
13 13
13
16
20
Pen Servo and Plotter Assembly (1/2)
12
14
15
18
17
18
19
21
22
23
24 25
26
27
28 29
30
30
31
32
33
34
35
36
36
37
38 39 40
41
6.1 Customer Maintenance Parts List (Pen Model)