INFICON RSH-600 Rotary Sensor - Manual (Page 18)

2 - 2
IPN
1
5
3800
-G
RSH-600 Operating Manual
To guard against spattering, use a source shutter to shield the sensor during the
initial soak periods. If the crystal is hit with even a minute particle of molten
material, it may be damaged and stop oscillating. Even in cases when it does not
completely stop oscillating, it may immediately become unstable, or shortly after
deposition begins instability may occur.
Plan the installation to insure that there are no obstructions blocking a direct path
between the sensor and the source. Install sensors in such a manner that the
center axis of the crystal is aimed directly at the source to be monitored. Verify that
the angle of the sensor location (with reference to the source) is well within the
evaporant stream.
2.2 Mounting
NOTE: The head cover must be removed from the RSH-600 prior to installation.
To remove the standard stainless steel head cover: Loosen the retainer
ring nut. Push the head cover inward while turning it counterclockwise until
it stops (1/16 of a turn). Pull the head cover outward.
To remove the optional copper head cover: Loosen the Allen head screws
that clamp the head to the RSH-600 then gently pull the head off of the
RSH-600 barrel.
The vacuum system has to be equipped with a 2.0 in. diameter aperture port. This
port must have an O-ring to provide vacuum seal to the fixed flange on the
RSH-600. If the head cover has been removed, simply slide the RSH-600 through
the 2.0 in. port. Secure the RSH-600 to the port using four 1/4-24 bolts minimum.
Reinstall the head cover. See
Figure 2-2 .
Figure 2-2 Typical Mounting Configuration
J2
J1
6 in. Coaxial Cable
Oscillator
10 ft. Coaxial Oscillator
Water In
Optional Flange
Water Out
Air Solenoid Valve
Cable to QCM